Ex situ metrology of x-ray diffraction gratings
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
سال: 2013
ISSN: 0168-9002
DOI: 10.1016/j.nima.2012.10.109